Design and implementation of a large measurement-range AFM scanning system

Jim-Wei Wu, Yuan-Zhi Peng, Jyun-Jhih Chen, Kuan-Chia Huang, Mei-Yung Chen, Li-Chen Fu. Design and implementation of a large measurement-range AFM scanning system. In American Control Conference, ACC 2012, Montreal, QC, Canada, June 27-29, 2012. pages 895-900, IEEE, 2012. [doi]

Authors

Jim-Wei Wu

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Yuan-Zhi Peng

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Jyun-Jhih Chen

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Kuan-Chia Huang

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Mei-Yung Chen

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Li-Chen Fu

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