Shih-Jeh Wu, Ting-Wai Shen. Study of piezoelectric aluminum nitride thin film by RF magnetron sputtering. In IEEE International Conference on Robotics and Biomimetics, ROBIO 2005, Shatin, N.T. China, 5-9 July 2005. pages 444-449, IEEE, 2005. [doi]
@inproceedings{WuS05-6,
title = {Study of piezoelectric aluminum nitride thin film by RF magnetron sputtering},
author = {Shih-Jeh Wu and Ting-Wai Shen},
year = {2005},
doi = {10.1109/ROBIO.2005.246308},
url = {http://dx.doi.org/10.1109/ROBIO.2005.246308},
researchr = {https://researchr.org/publication/WuS05-6},
cites = {0},
citedby = {0},
pages = {444-449},
booktitle = {IEEE International Conference on Robotics and Biomimetics, ROBIO 2005, Shatin, N.T. China, 5-9 July 2005},
publisher = {IEEE},
isbn = {0-7803-9315-5},
}