Shih-Jeh Wu, Ting-Wai Shen. Study of piezoelectric aluminum nitride thin film by RF magnetron sputtering. In IEEE International Conference on Robotics and Biomimetics, ROBIO 2005, Shatin, N.T. China, 5-9 July 2005. pages 444-449, IEEE, 2005. [doi]
Abstract is missing.