Design and control of a long-stroke nano-positioning stage

R.-C. Wu, I. H. Tsai, F. C. Wang, J. Y. Yen. Design and control of a long-stroke nano-positioning stage. In Proceedings of the 2013 IEEE/SICE International Symposium on System Integration, SII 2013, Kobe, Japan, December 15-17, 2013. pages 138-143, IEEE, 2013. [doi]

@inproceedings{WuTWY13,
  title = {Design and control of a long-stroke nano-positioning stage},
  author = {R.-C. Wu and I. H. Tsai and F. C. Wang and J. Y. Yen},
  year = {2013},
  doi = {10.1109/SII.2013.6776643},
  url = {http://dx.doi.org/10.1109/SII.2013.6776643},
  researchr = {https://researchr.org/publication/WuTWY13},
  cites = {0},
  citedby = {0},
  pages = {138-143},
  booktitle = {Proceedings of the 2013 IEEE/SICE International Symposium on System Integration, SII 2013, Kobe, Japan, December 15-17, 2013},
  publisher = {IEEE},
}