Design and control of a long-stroke nano-positioning stage

R.-C. Wu, I. H. Tsai, F. C. Wang, J. Y. Yen. Design and control of a long-stroke nano-positioning stage. In Proceedings of the 2013 IEEE/SICE International Symposium on System Integration, SII 2013, Kobe, Japan, December 15-17, 2013. pages 138-143, IEEE, 2013. [doi]

Abstract

Abstract is missing.