Measuring the fracture toughness of low-k thin films used in advanced packaging

Luchao Wu, Lei Wang, Jun Wang. Measuring the fracture toughness of low-k thin films used in advanced packaging. In 2021 IEEE International Conference on Integrated Circuits, Technologies and Applications, ICTA 2021, Zhuhai, China, November 24-26, 2021. pages 131-132, IEEE, 2021. [doi]

Abstract

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