Modeling of a bistable MEMS mechanism with torsion/cantilever beams

Yibo Wu, Juan Wang, Xiaobo Zhang, Congchun Zhang, Guifu Ding. Modeling of a bistable MEMS mechanism with torsion/cantilever beams. In 5th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2010, Xiamen, China, January 20-23, 2010. pages 153-156, IEEE, 2010. [doi]

Abstract

Abstract is missing.