Design, Fabrication, and Testing of a New Compact Piezo-Driven Flexure Stage for Vertical Micro/Nanopositioning

Zeyi Wu, Qingsong Xu. Design, Fabrication, and Testing of a New Compact Piezo-Driven Flexure Stage for Vertical Micro/Nanopositioning. IEEE T. Automation Science and Engineering, 16(2):908-918, 2019. [doi]

Abstract

Abstract is missing.