Guoqiang Wu, Dehui Xu, Bin Xiong, Yinglei Ma, Yuelin Wang, Errong Jing. Analysis of air damping in micromachined resonators. In 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2012, Kyoto, Japan, March 5-8, 2012. pages 469-472, IEEE, 2012. [doi]
@inproceedings{WuXXMWJ12,
title = {Analysis of air damping in micromachined resonators},
author = {Guoqiang Wu and Dehui Xu and Bin Xiong and Yinglei Ma and Yuelin Wang and Errong Jing},
year = {2012},
doi = {10.1109/NEMS.2012.6196819},
url = {http://dx.doi.org/10.1109/NEMS.2012.6196819},
researchr = {https://researchr.org/publication/WuXXMWJ12},
cites = {0},
citedby = {0},
pages = {469-472},
booktitle = {7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2012, Kyoto, Japan, March 5-8, 2012},
publisher = {IEEE},
isbn = {978-1-4673-1122-9},
}