Guoqiang Wu, Dehui Xu, Bin Xiong, Yinglei Ma, Yuelin Wang, Errong Jing. Analysis of air damping in micromachined resonators. In 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2012, Kyoto, Japan, March 5-8, 2012. pages 469-472, IEEE, 2012. [doi]
Abstract is missing.