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A Closed-Form Solution for Schedulability and Optimal Scheduling of Dual-Arm Cluster Tools With Wafer Residency Time Constraint Based on Steady Schedule Analysis

Naiqi Wu, MengChu Zhou. A Closed-Form Solution for Schedulability and Optimal Scheduling of Dual-Arm Cluster Tools With Wafer Residency Time Constraint Based on Steady Schedule Analysis. IEEE T. Automation Science and Engineering, 7(2):303-315, 2010. [doi]

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