A novel scheduling approach to dual-arm cluster tools with wafer revisiting

Naiqi Wu, MengChu Zhou. A novel scheduling approach to dual-arm cluster tools with wafer revisiting. In Proceedings of the IEEE International Conference on Systems, Man, and Cybernetics, SMC 2012, Seoul, Korea (South), October 14-17, 2012. pages 1213-1218, IEEE, 2012. [doi]

Abstract

Abstract is missing.