A Greedy Dynamic Priority Dispatching Policy for Intrabay in Semiconductor Wafer Fabrication System

Lihui Wu, Jie Zhang, Yinbin Sun, Gong Zhang. A Greedy Dynamic Priority Dispatching Policy for Intrabay in Semiconductor Wafer Fabrication System. In George Q. Huang, K. L. Mak, Paul G. Maropoulos, editors, Proceedings of the 6th CIRP-Sponsored International Conference on Digital Enterprise Technology, DET 2009, Hong Kong, China, December 14.16, 2009. Volume 66 of Advances in Intelligent and Soft Computing, pages 927-938, Springer, 2009. [doi]

Abstract

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