A Hybrid Vehicle Dispatching Approach for Unified Automated Material Handling System in 300mm Semiconductor Wafer Fabrication System

Lihui Wu, Zhongwei Zhang, Jie Zhang. A Hybrid Vehicle Dispatching Approach for Unified Automated Material Handling System in 300mm Semiconductor Wafer Fabrication System. IEEE Access, 7:174028-174041, 2019. [doi]

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