A Hybrid Vehicle Dispatching Approach for Unified Automated Material Handling System in 300mm Semiconductor Wafer Fabrication System

Lihui Wu, Zhongwei Zhang, Jie Zhang. A Hybrid Vehicle Dispatching Approach for Unified Automated Material Handling System in 300mm Semiconductor Wafer Fabrication System. IEEE Access, 7:174028-174041, 2019. [doi]

Abstract

Abstract is missing.