A Cantilever-Based Structure for Surface Features Characterization

Cao Xia, Dong F. Wang, Xu Du, Guowen Zheng, Haonan Feng, Linjun An, Mengyuan Mao, Xin Liu. A Cantilever-Based Structure for Surface Features Characterization. In 13th IEEE Annual International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2018, Singapore, Singapore, April 22-26, 2018. pages 221-224, IEEE, 2018. [doi]

Abstract

Abstract is missing.