Yanming Xia, Tao Wang, Lu Song, Xuanyanz Li, Shenglin Ma, Rongfeng Luo, Jing Chen, Wei Wang, Yufeng Jin. A Study on High Resolution Batch-Mode Micro-Utralsonic-Machining with Constant Feed Force of Sapphire for MEMS Application. In 13th IEEE Annual International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2018, Singapore, Singapore, April 22-26, 2018. pages 304-307, IEEE, 2018. [doi]
Abstract is missing.