Contact pitch and location prediction for Directed Self-Assembly template verification

Zigang Xiao, Yuelin Du, Martin D. F. Wong, He Yi, H.-S. Philip Wong, Hongbo Zhang. Contact pitch and location prediction for Directed Self-Assembly template verification. In The 20th Asia and South Pacific Design Automation Conference, ASP-DAC 2015, Chiba, Japan, January 19-22, 2015. pages 644-651, IEEE, 2015. [doi]

Authors

Zigang Xiao

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Yuelin Du

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Martin D. F. Wong

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He Yi

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H.-S. Philip Wong

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Hongbo Zhang

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