Contact pitch and location prediction for Directed Self-Assembly template verification

Zigang Xiao, Yuelin Du, Martin D. F. Wong, He Yi, H.-S. Philip Wong, Hongbo Zhang. Contact pitch and location prediction for Directed Self-Assembly template verification. In The 20th Asia and South Pacific Design Automation Conference, ASP-DAC 2015, Chiba, Japan, January 19-22, 2015. pages 644-651, IEEE, 2015. [doi]

Abstract

Abstract is missing.