Design of contactless electromagnetic levitation and electrostatic driven rotation control system for a micro mirror

Qijun Xiao, Kraft Michael, Zhonghui Luo, Jianping Chen, Jianbin Wang. Design of contactless electromagnetic levitation and electrostatic driven rotation control system for a micro mirror. In 15th International Conference on Control, Automation, Robotics and Vision, ICARCV 2018, Singapore, November 18-21, 2018. pages 1176-1179, IEEE, 2018. [doi]

Abstract

Abstract is missing.