Predictive Control of Nano-positioning Stage Using Recurrent-neural-network-based Inversion Model

Shengwen Xie, Juan Ren. Predictive Control of Nano-positioning Stage Using Recurrent-neural-network-based Inversion Model. In 58th IEEE Conference on Decision and Control, CDC 2019, Nice, France, December 11-13, 2019. pages 7764-7769, IEEE, 2019. [doi]

Abstract

Abstract is missing.