Long-Term Bilayer Encapsulation Performance of Atomic Layer Deposited Al $_{\bf 2}$O$_{\bf 3}$ and Parylene C for Biomedical Implantable Devices - researchr publication

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Xianzong Xie, Loren Rieth, Ryan Caldwell, Mohit Diwekar, Prashant Tathireddy, Rohit Sharma, Florian Solzbacher. Long-Term Bilayer Encapsulation Performance of Atomic Layer Deposited Al $_{\bf 2}$O$_{\bf 3}$ and Parylene C for Biomedical Implantable Devices. IEEE Trans. Biomed. Engineering, 60(10):2943-2951, 2013. [doi]

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