Jianbing Xie, Meng Song, Weizheng Yuan. A high sensitivity micromachined accelerometer with an enhanced inertial mass SOI MEMS process. In 8th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2013, Suzhou, China, April 7-10, 2013. pages 336-339, IEEE, 2013. [doi]
Abstract is missing.