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Calibration and nonlinearity compensation for force application in AFM based nanomanipulation

Hui Xie, Julien Vitard, D. Sinan Haliyo, Stephane Régnier. Calibration and nonlinearity compensation for force application in AFM based nanomanipulation. In 2008 IEEE/RSJ International Conference on Intelligent Robots and Systems, September 22-26, 2008, Acropolis Convention Center, Nice, France. pages 4024-4029, IEEE, 2008. [doi]

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Hui Xie

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Julien Vitard

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D. Sinan Haliyo

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Stephane Régnier

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