A Z-axis Quartz Cross-fork Micromachined Gyroscope Based on Shear Stress Detection

Liqiang Xie, Xuezhong Wu, Shengyi Li, Haoxu Wang, Jianbin Su, Peitao Dong. A Z-axis Quartz Cross-fork Micromachined Gyroscope Based on Shear Stress Detection. Sensors, 10(3):1573-1588, 2010. [doi]

Abstract

Abstract is missing.