A Lateral Differential Resonant Pressure Microsensor Based on SOI-Glass Wafer-Level Vacuum Packaging - researchr publication authors

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Bo Xie, Yonghao Xing, Yanshuang Wang, Jian Chen, Deyong Chen, Junbo Wang. A Lateral Differential Resonant Pressure Microsensor Based on SOI-Glass Wafer-Level Vacuum Packaging. Sensors, 15(9):24257-24268, 2015. [doi]

This author has not been identified. Look up 'Bo Xie' in GoogleThis author has not been identified. Look up 'Yonghao Xing' in GoogleThis author has not been identified. Look up 'Yanshuang Wang' in GoogleThis author has not been identified. Look up 'Jian Chen' in GoogleThis author has not been identified. Look up 'Deyong Chen' in GoogleThis author has not been identified. Look up 'Junbo Wang' in Google

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