Yu Xin, Xuezhong Wu, Dingbang Xiao, Zhanqiang Hou, Kun He, Zhihua Chen. A micromachined gyroscope with an effective stress-released frame. In 8th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2013, Suzhou, China, April 7-10, 2013. pages 994-997, IEEE, 2013. [doi]
@inproceedings{XinWXHHC13,
title = {A micromachined gyroscope with an effective stress-released frame},
author = {Yu Xin and Xuezhong Wu and Dingbang Xiao and Zhanqiang Hou and Kun He and Zhihua Chen},
year = {2013},
doi = {10.1109/NEMS.2013.6559889},
url = {http://dx.doi.org/10.1109/NEMS.2013.6559889},
researchr = {https://researchr.org/publication/XinWXHHC13},
cites = {0},
citedby = {0},
pages = {994-997},
booktitle = {8th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2013, Suzhou, China, April 7-10, 2013},
publisher = {IEEE},
}