Yu Xin, Xuezhong Wu, Dingbang Xiao, Zhanqiang Hou, Kun He, Zhihua Chen. A micromachined gyroscope with an effective stress-released frame. In 8th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2013, Suzhou, China, April 7-10, 2013. pages 994-997, IEEE, 2013. [doi]
Abstract is missing.