A Self-Calibration Stitching Method for Pitch Deviation Evaluation of a Long-Range Linear Scale by Using a Fizeau Interferometer

Xin Xiong, Yuki Shimizu, Hiraku Matsukuma, Wei Gao. A Self-Calibration Stitching Method for Pitch Deviation Evaluation of a Long-Range Linear Scale by Using a Fizeau Interferometer. Sensors, 21(21):7412, 2021. [doi]

Abstract

Abstract is missing.