Xingguo Xiong, Yu-Liang Wu, Wen-Ben Jone. A dual-mode built-in self-test technique for capacitive MEMS devices. IEEE T. Instrumentation and Measurement, 54(5):1739-1750, 2005. [doi]
@article{XiongWJ05-0, title = {A dual-mode built-in self-test technique for capacitive MEMS devices}, author = {Xingguo Xiong and Yu-Liang Wu and Wen-Ben Jone}, year = {2005}, doi = {10.1109/TIM.2005.855094}, url = {http://dx.doi.org/10.1109/TIM.2005.855094}, researchr = {https://researchr.org/publication/XiongWJ05-0}, cites = {0}, citedby = {0}, journal = {IEEE T. Instrumentation and Measurement}, volume = {54}, number = {5}, pages = {1739-1750}, }