A dual-mode built-in self-test technique for capacitive MEMS devices

Xingguo Xiong, Yu-Liang Wu, Wen-Ben Jone. A dual-mode built-in self-test technique for capacitive MEMS devices. IEEE T. Instrumentation and Measurement, 54(5):1739-1750, 2005. [doi]

@article{XiongWJ05-0,
  title = {A dual-mode built-in self-test technique for capacitive MEMS devices},
  author = {Xingguo Xiong and Yu-Liang Wu and Wen-Ben Jone},
  year = {2005},
  doi = {10.1109/TIM.2005.855094},
  url = {http://dx.doi.org/10.1109/TIM.2005.855094},
  researchr = {https://researchr.org/publication/XiongWJ05-0},
  cites = {0},
  citedby = {0},
  journal = {IEEE T. Instrumentation and Measurement},
  volume = {54},
  number = {5},
  pages = {1739-1750},
}