Self-Calibration of a Large-Scale Variable-Line-Spacing Grating for an Absolute Optical Encoder by Differencing Spatially Shifted Phase Maps from a Fizeau Interferometer

Xin Xiong, Chenguang Yin, Lue Quan, Ryo Sato, Hiraku Matsukuma, Yuki Shimizu, Hideaki Tamiya, Wei Gao. Self-Calibration of a Large-Scale Variable-Line-Spacing Grating for an Absolute Optical Encoder by Differencing Spatially Shifted Phase Maps from a Fizeau Interferometer. Sensors, 22(23):9348, 2022. [doi]

Abstract

Abstract is missing.