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A Dual-Beam Differential Method Based on Feedback Interferometry for Noncontact Measurement of Linear and Angular Displacement

Xin Xu, Zongren Dai, Yidong Tan. A Dual-Beam Differential Method Based on Feedback Interferometry for Noncontact Measurement of Linear and Angular Displacement. IEEE Transactions on Industrial Electronics, 70(6):6405-6413, June 2023. [doi]

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