All-Si Metasurface Polarizing Bandpass Filter Mass Produced on 12 Inch Wafer

Z. J. Xu, Y. Dong, C.-K. Tseng, T. Hu, J. C. Tong, Q. Z. Zhong, L. Sim, K. H. Lai, Y. Lin, D. D. Li, Y. Li, V. Bliznetsov, Y.-H. Fu, S. Y. Zhu, Q. Y. Lin, D. H. Zhang, D. L. Kwong, Y. D. Gu. All-Si Metasurface Polarizing Bandpass Filter Mass Produced on 12 Inch Wafer. In Optical Fiber Communications Conference and Exhibition, OFC 2019, San Diego, CA, USA, March 3-7, 2019. pages 1-3, IEEE, 2019. [doi]

Abstract

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