Kalman filtering-based supervisory run-to-run control method for semiconductor diffusion processes

Zhao Xu, Changhua Hu, Jinwen Hu. Kalman filtering-based supervisory run-to-run control method for semiconductor diffusion processes. Science in China Series F: Information Sciences, 62(8):89201, 2019. [doi]

Authors

Zhao Xu

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Changhua Hu

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Jinwen Hu

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