Zhao Xu, Changhua Hu, Jinwen Hu. Kalman filtering-based supervisory run-to-run control method for semiconductor diffusion processes. Science in China Series F: Information Sciences, 62(8):89201, 2019. [doi]
@article{XuHH19-0,
title = {Kalman filtering-based supervisory run-to-run control method for semiconductor diffusion processes},
author = {Zhao Xu and Changhua Hu and Jinwen Hu},
year = {2019},
doi = {10.1007/s11432-018-9593-1},
url = {https://doi.org/10.1007/s11432-018-9593-1},
researchr = {https://researchr.org/publication/XuHH19-0},
cites = {0},
citedby = {0},
journal = {Science in China Series F: Information Sciences},
volume = {62},
number = {8},
pages = {89201},
}