Elimination of stress induced dislocation in deep Poly Sinker LDMOS technology

Xiangming Xu, Jingfeng Huang, Han Yu, Biao Ma, Peng-fei Wang, David Wei Zhang. Elimination of stress induced dislocation in deep Poly Sinker LDMOS technology. Microelectronics Reliability, 55(3-4):486-491, 2015. [doi]

Abstract

Abstract is missing.