Evidence on the impact of T-shaped tether variations on Q factor of bulk-mode square-plate resonators

Yuanjie Xu, Joshua E.-Y. Lee. Evidence on the impact of T-shaped tether variations on Q factor of bulk-mode square-plate resonators. In 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2012, Kyoto, Japan, March 5-8, 2012. pages 463-468, IEEE, 2012. [doi]

Abstract

Abstract is missing.