A high heating efficiency two-beam microhotplate for catalytic gas sensors

Lei Xu, Tie Li, Xiuli Gao, Yuelin Wang. A high heating efficiency two-beam microhotplate for catalytic gas sensors. In 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2012, Kyoto, Japan, March 5-8, 2012. pages 65-68, IEEE, 2012. [doi]

Abstract

Abstract is missing.