CMOS MEMS Thermal Flow Sensor With Enhanced Sensitivity for Heating, Ventilation, and Air Conditioning Application - researchr publication

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Wei Xu, Xiaoyi Wang, Ruijie Wang, Izhar, Jingcui Xu, Yi-Kuen Lee. CMOS MEMS Thermal Flow Sensor With Enhanced Sensitivity for Heating, Ventilation, and Air Conditioning Application. IEEE Transactions on Industrial Electronics, 68(5):4468-4476, 2021. [doi]

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