Yinghua Xu, Weiping Yan, Tun Cao, Peng Liu. Design and simulation of PDMS-Si machined micro-liquid flow sensor. In 11th IEEE International Conference on Control & Automation, ICCA 2014, Taichung, Taiwan, June 18-20, 2014. pages 1247-1250, IEEE, 2014. [doi]
Abstract is missing.