Kaisi Xu, Ningli Zhu, Shan Cao, Weiguo Su, Wei Zhang, Yilong Hao. Design and simulation of MEMS thermal and vibration isolator based on PDMS beam arrays. In 11th IEEE Annual International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2016, Sendai, Japan, April 17-20, 2016. pages 213-216, IEEE, 2016. [doi]
Abstract is missing.