Huiming Xu, Hong Zhang, Zhiqiang Deng, Haisheng San, Yuxi Yu. Fabrication of silicon piezoresistive pressure sensor using a reliable wet etching process. In 8th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2013, Suzhou, China, April 7-10, 2013. pages 424-427, IEEE, 2013. [doi]
@inproceedings{XuZDSY13, title = {Fabrication of silicon piezoresistive pressure sensor using a reliable wet etching process}, author = {Huiming Xu and Hong Zhang and Zhiqiang Deng and Haisheng San and Yuxi Yu}, year = {2013}, doi = {10.1109/NEMS.2013.6559763}, url = {http://dx.doi.org/10.1109/NEMS.2013.6559763}, researchr = {https://researchr.org/publication/XuZDSY13}, cites = {0}, citedby = {0}, pages = {424-427}, booktitle = {8th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2013, Suzhou, China, April 7-10, 2013}, publisher = {IEEE}, }