Huiming Xu, Hong Zhang, Zhiqiang Deng, Haisheng San, Yuxi Yu. Fabrication of silicon piezoresistive pressure sensor using a reliable wet etching process. In 8th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2013, Suzhou, China, April 7-10, 2013. pages 424-427, IEEE, 2013. [doi]
Abstract is missing.