Novel Mechanical Coupling Piezoelectric Micromachined Ultrasonic Transducers Based on Base Excitation System

Tingzhong Xu, Libo Zhao, Dejiang Lu, Zhikang Li, Na Zhao, Zhuangde Jiang. Novel Mechanical Coupling Piezoelectric Micromachined Ultrasonic Transducers Based on Base Excitation System. In 13th IEEE Annual International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2018, Singapore, Singapore, April 22-26, 2018. pages 216-220, IEEE, 2018. [doi]

Abstract

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