Multi-Modal Resonance Measurement Capable of Discerning and Visualizing Effects Due to Excitation Schemes in MEMS Resonator

Bo Xu, Jiankai Zhu, Tongqiao Miao, Jing Li, Qingyang Deng, Song Wu, Ting Wen, Fei Wang, Xiaoping Hu, Xuezhong Wu, Dingbang Xiao, Zenghui Wang. Multi-Modal Resonance Measurement Capable of Discerning and Visualizing Effects Due to Excitation Schemes in MEMS Resonator. In 16th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2021, Xiamen, China, April 25-29, 2021. pages 1410-1414, IEEE, 2021. [doi]

Abstract

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