Gaopeng Xue, Masaya Toda, Xinghui Li, Takahito Ono. Chip-level-microassembly Comb-drive XYZ-microstage with Large Displacements and Low Crosstalk. In 16th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2021, Xiamen, China, April 25-29, 2021. pages 43-46, IEEE, 2021. [doi]
@inproceedings{XueTLO21,
title = {Chip-level-microassembly Comb-drive XYZ-microstage with Large Displacements and Low Crosstalk},
author = {Gaopeng Xue and Masaya Toda and Xinghui Li and Takahito Ono},
year = {2021},
doi = {10.1109/NEMS51815.2021.9451392},
url = {https://doi.org/10.1109/NEMS51815.2021.9451392},
researchr = {https://researchr.org/publication/XueTLO21},
cites = {0},
citedby = {0},
pages = {43-46},
booktitle = {16th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2021, Xiamen, China, April 25-29, 2021},
publisher = {IEEE},
isbn = {978-1-6654-1941-3},
}