Gaopeng Xue, Masaya Toda, Xinghui Li, Takahito Ono. Chip-level-microassembly Comb-drive XYZ-microstage with Large Displacements and Low Crosstalk. In 16th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2021, Xiamen, China, April 25-29, 2021. pages 43-46, IEEE, 2021. [doi]
Abstract is missing.