Fabrication of ultra-thin silicon chips using thermally decomposable temporary bonding adhesive

Xingjun Xue, Shujie Yang, Dong Wu, Liyang Pan, Zheyao Wang. Fabrication of ultra-thin silicon chips using thermally decomposable temporary bonding adhesive. In 2016 IEEE SENSORS, Orlando, FL, USA, October 30 - November 3, 2016. pages 1-3, IEEE, 2016. [doi]

Authors

Xingjun Xue

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Shujie Yang

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Dong Wu

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Liyang Pan

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Zheyao Wang

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