Fabrication of silicon micro-rod array with controlled density and size distribution using porous silicon

Bahareh Yaghootkar, Mahmoud Amouzgar, Mojtaba Kahrizi. Fabrication of silicon micro-rod array with controlled density and size distribution using porous silicon. In 38th Annual Conference on IEEE Industrial Electronics Society, IECON 2012, Montreal, QC, Canada, October 25-28, 2012. pages 3962-3965, IEEE, 2012. [doi]

Abstract

Abstract is missing.