Arda D. Yalcinkaya, Søren Jensen, Ole Hansen. High aspect ratio MEMS capacitor for high frequency impedance matching applications. In Proceedings of the 2003 10th IEEE International Conference on Electronics, Circuits and Systems, ICECS 2003, Sharjah, United Arab Emirates, December 14-17, 2003. pages 918-921, IEEE, 2003. [doi]
Abstract is missing.